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An All Dry Mask Making Process by Gas Plasma
Yamazaki, Teruhiko, Tanaka, Kazuhiro, Nakata, HidefumiVolume:
20
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.20.2191
Date:
November, 1981
File:
PDF, 1.27 MB
1981