Monte Carlo Simulation Approach to Sputtering in...

Japanese Journal of Applied Physics 1985 / 11 Vol. 24; Iss. Part 1, No

Monte Carlo Simulation Approach to Sputtering in Multi-Component Targets

Kang, Hee Jae, Kawatoh, Eizoh, Shimizu, Ryuichi
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1409
Date:
November, 1985
File:
PDF, 743 KB
english, 1985
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