Effect of Heating Rate on Film Roughening in As-Doped Oxide

Japanese Journal of Applied Physics 1985 / 3 Vol. 24; Iss. Part 1, No

Effect of Heating Rate on Film Roughening in As-Doped Oxide

Tsunoda, Yoshihiro
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.365
Date:
March, 1985
File:
PDF, 1.32 MB
english, 1985
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