Characteristics of Cleaning and Carbonizing Plasmas in...

Japanese Journal of Applied Physics 1987 / 9 Vol. 26; Iss. Part 1, No

Characteristics of Cleaning and Carbonizing Plasmas in TEXTOR

Amemiya, Hiroshi, Ishii, Shigeyuki, Oyama, Hitoshi, Sakamoto, Yuichi, Minagawa, Hideki, Satake, Tohru, Hashiba, Masao, Yamashina, Toshiro, Noda, Nobuaki, Hori, Yoichiro, Akaishi, Kenya, Miyahara, Akir
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Volume:
26
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.26.1534
Date:
September, 1987
File:
PDF, 1.26 MB
english, 1987
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