Optoelectric Characteristics of a-Si/a-SiC...

Japanese Journal of Applied Physics 1989 / 10 Vol. 28; Iss. Part 1, No

Optoelectric Characteristics of a-Si/a-SiC Superlattice-Structure Films and Devices Fabricated by the Photo-CVD Method

Tarui, Hisaki, Matsuyama, Takao, Okamoto, Shingo, Takahama, Tuyoshi, Nakamura, Noboru, Tsuda, Shinya, Nakano, Shoichi, Ohnishi, Michitoshi, Kuwano, Yukinori
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Volume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.1769
Date:
October, 1989
File:
PDF, 923 KB
1989
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