Preparation of Cubic Boron Nitride Films by RF Sputtering

Japanese Journal of Applied Physics 1990 / 7 Vol. 29; Iss. Part 2, No

Preparation of Cubic Boron Nitride Films by RF Sputtering

Mieno, Masahiro, Yoshida, Toyonobu
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1175
Date:
July, 1990
File:
PDF, 210 KB
english, 1990
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