Evidence for Phosphorus Passivation of Plasma-Induced...

Japanese Journal of Applied Physics 1990 / 9 Vol. 29; Iss. Part 2, No

Evidence for Phosphorus Passivation of Plasma-Induced Damage at GaAs Surface Probed by EL2 Traps

Sugino, Takashi, Yamada, Takashi, Matsuda, Koichiro, Shirafuji, Junji
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1575
Date:
September, 1990
File:
PDF, 498 KB
1990
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