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Structural Characterizations of Conformally Grown (100) Si Films
Pribat, D., Chazelas, J., Dupuy, M.Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1943
Date:
November, 1990
File:
PDF, 327 KB
english, 1990