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Substrate Bias and Pressure Effect on Formation of YBaCuO Thin Films in RF Magnetron Sputtering System
Nakagawa, Akira, Sugiura, Masayuki, Okabe, YoichiVolume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L993
Date:
June, 1991
File:
PDF, 333 KB
english, 1991