Novel Electron Beam Direct Writing Technique for the Hole...

Japanese Journal of Applied Physics 1992 / 12 Vol. 31; Iss. Part 1, No

Novel Electron Beam Direct Writing Technique for the Hole Pattern of Quarter-Micron Devices

Fujino, Takeshi, Ishii, Atsushi, Kawai, Kenji, Matsuba, Motoko, Nakao, Shuji, Watakabe, Yaichiro, Akasaka, Yoichi
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.4262
Date:
December, 1992
File:
PDF, 1.38 MB
1992
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