Liquid-Nitrogen-Cooled Dry Etching of YBaCuO Thin Films

Japanese Journal of Applied Physics 1992 / 8 Vol. 31; Iss. Part 2, No

Liquid-Nitrogen-Cooled Dry Etching of YBaCuO Thin Films

Sato, Hiroshi, Akoh, Hiroshi, Nishihara, Keirou, Aoyagi, Masahiro, Takada, Susumu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L1044
Date:
August, 1992
File:
PDF, 313 KB
english, 1992
Conversion to is in progress
Conversion to is failed