Estimation of the Thickness of Ultrathin Silicon Nitride...

Japanese Journal of Applied Physics 1993 / 8 Vol. 32; Iss. Part 1, No

Estimation of the Thickness of Ultrathin Silicon Nitride Films by X-Ray Photoelectron Spectroscopy

Muto, Akiko, Mine, Toshiyuki, Nakazawa, Masatoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3580
Date:
August, 1993
File:
PDF, 372 KB
english, 1993
Conversion to is in progress
Conversion to is failed