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An Anomalous Enhanced Tail Diffusion of Boron in Directly Bonded Samples of Heavily and Lightly Doped Silicon
Wijaranakula, WitawatVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3872
Date:
September, 1993
File:
PDF, 290 KB
english, 1993