Heteroepitaxial TiN Films Grown by Reactive Ion Beam...

Japanese Journal of Applied Physics 1993 / 11 Vol. 32; Iss. Part 2, No

Heteroepitaxial TiN Films Grown by Reactive Ion Beam Epitaxy at Room Temperature

Kawakubo, Takashi, Sano, Kenya, Oose, Michihiro
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1692
Date:
November, 1993
File:
PDF, 609 KB
1993
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