Analysis of Fluorocarbon Film Deposited by Highly Selective Oxide Etching
Akimoto, Takeshi, Furuoya, Shuichi, Harasima, Keiichi, Ikawa, EijiVolume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.2151
Date:
April, 1994
File:
PDF, 462 KB
1994