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Microcrystalline SiC Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures
Cheng, Kuan-Lun, Cheng, Huang-Chung, Liu, Chih-Chien, ChiapyngLee,, Yew, Tri-RungVolume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.5527
Date:
October, 1995
File:
PDF, 842 KB
english, 1995