A Study on the Fabrication of a Multigate/Multichannel Polysilicon Thin Film Transistor
Park, Jae-Hong, Kim, Chul-JuVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1428
Date:
March, 1997
File:
PDF, 214 KB
english, 1997