Highly Oxidation-Resistant TiN Barrier Layers for...

Japanese Journal of Applied Physics 1997 / 3 Vol. 36; Iss. Part 1, No

Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors

Matsui, Yuichi, Torii, Kazuyoshi, Kushida, Keiko, Miki, Hiroshi, Fujisaki, Yoshihisa
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1586
Date:
March, 1997
File:
PDF, 227 KB
english, 1997
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