Dependence of Frequency and Pressure on Electron Energy...

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 2, No

Dependence of Frequency and Pressure on Electron Energy Distribution Functions in Low Pressure Plasma

Akashi, Haruaki, Samukawa, Seiji, Takahashi, Nobuaki, Sasaki, Tai
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L877
Date:
July, 1997
File:
PDF, 147 KB
english, 1997
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