Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window
Furukawa, Masakazu, Saito, Naoki, Kawamura, Katsufumi, Koromogawa, Takashi, Shindo, HaruoVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L1005
Date:
August, 1998
File:
PDF, 1.35 MB
english, 1998