Cantilever Type Lead Zirconate Titanate Microactuator...

Japanese Journal of Applied Physics 2000 / 5 Vol. 39; Iss. Part 1, No

Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide

Lee, Sun-Ho, Jeon, Min-Seok, Hong, Kyung-Il, Lee, Jin-Won, Kim, Chang-Kyung, Choi, Duck-Kyun
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.2859
Date:
May, 2000
File:
PDF, 291 KB
english, 2000
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