Simulation of Multilayer Defects in Extreme Ultraviolet Masks
Ito, Masaaki, Ogawa, Taro, Otaki, Katsura, Nishiyama, Iwao, Okazaki, Shinji, Terasawa, TsuneoVolume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.2549
Date:
April, 2001
File:
PDF, 833 KB
english, 2001