Efficiency of Parallel-Plate Capacitive Radio Frequency...

Japanese Journal of Applied Physics 2002 / 7 Vol. 41; Iss. Part 1, No

Efficiency of Parallel-Plate Capacitive Radio Frequency Discharge Plasma

Ikegaki, Hideki, Tajima, Shinjiro, Endo, Masao, Amemiya, Hiroshi
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4729
Date:
July, 2002
File:
PDF, 117 KB
english, 2002
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