Fabrication of Micropatterns on Sapphire Substrates via...

Japanese Journal of Applied Physics 2002 / 11 Vol. 41; Iss. Part 1, No

Fabrication of Micropatterns on Sapphire Substrates via Room-Temperature Selective Homoepitaxial Growth Induced by Electron Beam Irradiation

Sasaki, Atsushi, Isa, Hiroshi, Liu, Jin, Akiba, Shusaku, Hanada, Teiichi, Yoshimoto, Mamoru
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.6534
Date:
November, 2002
File:
PDF, 1.82 MB
english, 2002
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