Control of Pore Structures in Periodic Porous Silica Low-...

Japanese Journal of Applied Physics 2004 / 4 Vol. 43; Iss. 4A

Control of Pore Structures in Periodic Porous Silica Low- k Films

Hata, Nobuhiro, Negoro, Chie, Yamada, Kazuhiro, Kikkawa, Takamaro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.1323
Date:
April, 2004
File:
PDF, 174 KB
english, 2004
Conversion to is in progress
Conversion to is failed