Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
Sato, Norio, Shimoyama, Nobuhiro, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Ishii, Hiromu, Machida, KatsuyukiVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.2271
Date:
April, 2004
File:
PDF, 152 KB
english, 2004