Realization of In Situ Doped...

Japanese Journal of Applied Physics 2005 / 4 Vol. 44; Iss. 4B

Realization of In Situ Doped n-Type and p-Type Si-Microprobe Array by Selective Vapor-Liquid-Solid (VLS) Growth Method

Islam, Md. Shofiqul, Ishino, Hiroshi, Kawano, Takeshi, Takao, Hidekuni, Sawada, Kazuaki, Ishida, Makoto
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2161
Date:
April, 2005
File:
PDF, 259 KB
english, 2005
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