Dose Dependence of Recrystallization Processes in Amorphous SiC
Bae, In-Tae, Ishimaru, Manabu, Hirotsu, YoshihikoVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.6196
Date:
August, 2005
File:
PDF, 1.15 MB
english, 2005