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Investigation of Surface Damage in Si Exposed to Ar Plasma by Spectroscopic Ellipsometry and Grazing X-Ray Diffraction
Yamada, Takahiro, Mizuno, Kaoru, Kitahara, Kuninori, Moritani, AkihiroVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.67
Date:
January, 2005
File:
PDF, 710 KB
english, 2005