Novel Method for In Situ Monitoring of Thickness of Quartz during Wet Etching
Lee, Chi-Yuan, Chang, Pei-Zen, Chen, Yung-Yu, Dai, Ching-Liang, Chen, Ping-Hei, Lee, Shuo-JenVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.7662
Date:
October, 2005
File:
PDF, 668 KB
english, 2005