Crystallization of Si in Millisecond Time Domain Induced by...

Japanese Journal of Applied Physics 2006 / 5 Vol. 45; Iss. 5B

Crystallization of Si in Millisecond Time Domain Induced by Thermal Plasma Jet Irradiation

Higashi, Seiichiro, Kaku, Hirotaka, Okada, Tatsuya, Murakami, Hideki, Miyazaki, Seiichi
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.4313
Date:
May, 2006
File:
PDF, 526 KB
english, 2006
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