Fabrication of Polycrystalline Silicon Thin Film...

Japanese Journal of Applied Physics 2007 / 3 Vol. 46; Iss. 3B

Fabrication of Polycrystalline Silicon Thin Film Transistors in Array Patterns by Field-Aided Lateral Crystallization Technique

Kim, Hyun-Chul, Park, Chan-Jun, Han, Tae-Seok, Jeon, Hyeon-Pyo, Kim, Young-Bae, Noguchi, Takashi, Choi, Duck-Kyun
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.1258
Date:
March, 2007
File:
PDF, 502 KB
english, 2007
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