Evolution of One-Dimensional Gratings with High Aspect...

Japanese Journal of Applied Physics 2007 / 11 Vol. 46; Iss. 11

Evolution of One-Dimensional Gratings with High Aspect Ratios on Si(001) Surfaces by High-Temperature Annealing

Nakamura, Jun, Sudoh, Koichi, Iwasaki, Hiroshi
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.7194
Date:
November, 2007
File:
PDF, 486 KB
english, 2007
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