Analysis of Continuous-Wave Laser Lateral Crystallized...

Japanese Journal of Applied Physics 2008 / 4 Vol. 47; Iss. 4

Analysis of Continuous-Wave Laser Lateral Crystallized Polycrystalline Silicon Thin Films with Large Tensile Strain

Fujii, Shuntaro, Kuroki, Shin-Ichiro, Zhu, Xiaoli, Numata, Masayuki, Kotani, Koji, Ito, Takashi
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.3046
Date:
April, 2008
File:
PDF, 365 KB
english, 2008
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