Development of Multibeam Electron Beam Direct Writing...

Japanese Journal of Applied Physics 2009 / 6 Vol. 48; Iss. 6

Development of Multibeam Electron Beam Direct Writing System Using Third-Order Imaging Technique

Fuse, Takashi, Kotsugi, Tadashi, Takeya, Koji, Kinoshita, Hidetoshi, Parker, N. William
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.06FB01
Date:
June, 2009
File:
PDF, 358 KB
english, 2009
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