Epitaxial Growth of GaN Films by Pulse-Mode Hot-Mesh...

Japanese Journal of Applied Physics 2009 / 7 Vol. 48; Iss. 7

Epitaxial Growth of GaN Films by Pulse-Mode Hot-Mesh Chemical Vapor Deposition

Komae, Yasuaki, Yasui, Kanji, Suemitsu, Maki, Endoh, Tetsuo, Ito, Takashi, Nakazawa, Hideki, Narita, Yuzuru, Takata, Masasuke, Akahane, Tadashi
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.076509
Date:
July, 2009
File:
PDF, 388 KB
english, 2009
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