Silicon Micromachining Based on Surfactant-Added...

Silicon Micromachining Based on Surfactant-Added Tetramethyl Ammonium Hydroxide: Etching Mechanism and Advanced Applications

Pal, Prem, Gosalvez, Miguel A., Sato, Kazuo
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.056702
Date:
May, 2010
File:
PDF, 330 KB
english, 2010
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