Polarization Analyzing Image Sensor with On-Chip Metal Wire...

Japanese Journal of Applied Physics 2011 / 4 Vol. 50; Iss. 4

Polarization Analyzing Image Sensor with On-Chip Metal Wire Grid Polarizer in 65-nm Standard Complementary Metal Oxide Semiconductor Process

Shishido, Sanshiro, Noda, Toshihiko, Sasagawa, Kiyotaka, Tokuda, Takashi, Ohta, Jun
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.04DL01
Date:
April, 2011
File:
PDF, 664 KB
english, 2011
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