Fabrication of Quartz Cantilevers for Small-Amplitude...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

Fabrication of Quartz Cantilevers for Small-Amplitude Dynamic Force Microscopy Using an Optical Deflection Sensor

Morita, Ken-ichi, Sasagawa, Yuuki, Murai, Yuusuke, Sugimoto, Yoshiaki, Abe, Masayuki, Morita, Seizo
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08LB12
Date:
August, 2011
File:
PDF, 301 KB
english, 2011
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