Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2015 / 9
Peculiarities of latent track etching in SiO2/Si structures irradiated with Ar, Kr and Xe ions
Al’zhanova, A., Dauletbekova, A., Komarov, F., Vlasukova, L., Yuvchenko, V., Akilbekov, A., Zdorovets, M.Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2015.08.046
Date:
September, 2015
File:
PDF, 1.83 MB
english, 2015