Fabrication of an integrated ΔE-E-silicon detector by wafer...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 1997 Vol. 391; Iss. 2

Fabrication of an integrated ΔE-E-silicon detector by wafer bonding using cobalt disilicide

Göran Thungström, Elbert Jan van Veldhuizen, Lars Westerberg, Lars-Olov Norlin, C.Sture Petersson
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Volume:
391
Year:
1997
Language:
english
Pages:
14
DOI:
10.1016/s0168-9002(97)00408-7
File:
PDF, 1.07 MB
english, 1997
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