Design and fluid–structure interaction analysis of a...

Micro & Nano Letters 2014 / 10 Vol. 9; Iss. 10

Design and fluid–structure interaction analysis of a micromachined cantilever-based differential pressure flow sensor

Chen, Pei, Li, Yiyao, Tian, Bian, Zhao, Yulong
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Volume:
9
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2014.0245
Date:
October, 2014
File:
PDF, 439 KB
english, 2014
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