Building thick photoresist structures from the bottom up

Journal of Micromechanics and Microengineering 2003 / 05 Vol. 13; Iss. 3

Building thick photoresist structures from the bottom up

Peterman, Mark C, Huie, Philip, Bloom, D M, Fishman, Harvey A
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Volume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/3/305
Date:
May, 2003
File:
PDF, 169 KB
english, 2003
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