Studies on the Measurement of Plasma Parameters by Means of...

Studies on the Measurement of Plasma Parameters by Means of the RF Probe Method

Matsumura, Shosaku, Chen, Sin-Li
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Volume:
18
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.18.1329
Date:
July, 1979
File:
PDF, 780 KB
1979
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