Surface Structure of Ion-Implanted Silica Glass

Japanese Journal of Applied Physics 1990 / 5 Vol. 29; Iss. Part 1, No

Surface Structure of Ion-Implanted Silica Glass

Fukumi, Kohei, Chayahara, Akiyoshi, Satou, Mamoru, Hayakawa, Junji, Hangyo, Masanori, Nakashima, Shin-ichi
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.905
Date:
May, 1990
File:
PDF, 531 KB
1990
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