Photochemical Decomposition of Triethylgallium on Si(111)...

Japanese Journal of Applied Physics 1993 / 4 Vol. 32; Iss. Part 1, No

Photochemical Decomposition of Triethylgallium on Si(111) Studied by Means of STM, LEED, AES and Mass Spectroscopy

Inukai, Junji, Mizutani, Wataru, Fukui, Ken-ichi, Shimizu, Hazime, Iwasawa, Yasuhiro
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.1768
Date:
April, 1993
File:
PDF, 2.10 MB
1993
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