Photoluminescence and Its Excimer Laser Irradiation Effects...

Japanese Journal of Applied Physics 1993 / 6 Vol. 32; Iss. Part 1, No

Photoluminescence and Its Excimer Laser Irradiation Effects in SiO 2 Film Prepared by Photo-Induced Chemical Vapor Deposition

Kanashima, Takeshi, Okuyama, Masanori, Hamakawa, Yoshihiro
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3113
Date:
June, 1993
File:
PDF, 577 KB
english, 1993
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