Improvement in Radiation Stability of SiN X-Ray Mask...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Improvement in Radiation Stability of SiN X-Ray Mask Membranes

Arakawa, Tomiyuki, Okuyama, Hiroshi, Yamashita, Yoshio, Ohta, Tuneaki, Kumar, Rakesh, Noda, Shuichi, Hoga, Hiroshi
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5941
Date:
December, 1993
File:
PDF, 329 KB
english, 1993
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