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Carrier Transport Properties of Conductive p-Si Wires by Focused Ion Beam Implantation
Iwano, Hirotaka, Zaima, Shigeaki, Kimura, Tomonori, Matsuo, Kohji, Yasuda, YukioVolume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.7190
Date:
December, 1994
File:
PDF, 773 KB
1994