Carrier Transport Properties of Conductive p-Si Wires by...

Japanese Journal of Applied Physics 1994 / 12 Vol. 33; Iss. Part 1, No

Carrier Transport Properties of Conductive p-Si Wires by Focused Ion Beam Implantation

Iwano, Hirotaka, Zaima, Shigeaki, Kimura, Tomonori, Matsuo, Kohji, Yasuda, Yukio
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.7190
Date:
December, 1994
File:
PDF, 773 KB
1994
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