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Spatial Frequency Doubling Method by Image Superimposition for Sub-$\bf 0.15\mbox{-}{\mbi \mu }m$ Optical Lithography
Otaka, Akihiro, Kawai, Yoshio, Tanaka, Akinobu, Matsuda, TadahitoVolume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.6518
Date:
December, 1995
File:
PDF, 1.64 MB
1995